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Volumn 37, Issue 3, 2003, Pages 90-97
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Tracking nanoposition advances
a
a
POLYTEC GMBH
(Germany)
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Author keywords
[No Author keywords available]
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Indexed keywords
TRAJECTORY CONTROL;
LASER APPLICATIONS;
LINEAR MOTORS;
LITHOGRAPHY;
MOTION CONTROL;
PIEZOELECTRIC TRANSDUCERS;
SENSORS;
VIBRATION CONTROL;
NANOSTRUCTURED MATERIALS;
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EID: 0037343279
PISSN: 07311230
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Review |
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Times cited : (2)
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References (0)
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