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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 4, 2000, Pages 1923-1928

Effects of (Ba,Sr)TiO3 film thickness on electrical properties of (Ba,Sr)TiO3/(Ba,Sr)RuO3 capacitor

(5) Oh, Se Hoon a Park, Kyung Woong a Park, Jeong Hee a Kim, Bourn Seock a Choi, Duck Kyun a

a Hanyang University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 23044524102 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (5)

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