Experimental investigation of the parameter dependency of the removal rate of thermochemically polished CVD diamond films

Journal of Solid State Electrochemistry

Volumn 5, Issue 2, 2001, Pages 112-118

  Weima, J A ^a   Fahrner, W R ^a   Job, R ^a  

^a UNIVERSITY OF HAGEN   (Germany)

Author keywords

CVD diamond film; Non diamond carbon; Raman spectroscopy; Removal rate; Thermochemical polishing

Indexed keywords

EID: 23044521516     PISSN: 14328488     EISSN: None     Source Type: Journal    
DOI: 10.1007/s100080000118     Document Type: Article

References (16)

1. Pang LYS, Chan SSM, Johnson C, Chalker PR, Jackman RB (1997) Diamond Relat Mater 6: 333
2. Looi HJ, Pang LYS, Wang Y, Whitfield MD, Jackman RB (1998) Diamond Relat Mater 7: 565
3. Lansley SP, Looi HJ, Whitfield MD, Jackman RB (1999) Diamond Relat Mater 8: 946
4. Kitani K, Umezawa H, Tsugawa K, Ueyama K, Ishikura T, Yamashita S, Kawarada H (1999) Diamond Relat Mater 8: 1831
5. Davidson JL, Wur DR, Kang WP, Kinser DL, Kerns DV (1996) Diamond Relat Mater 5: 86
6. Berderman E, Badura E, Neyer C, Schulze R, Stelzer H (1998) Nucl Phys B (Proc Suppl) 61: 399
7. Chio SR, Jung DY, Kweon SY, Jung SK (1996) Thin Solid Films 279: 110
8. Yoshikawa M, Okuzumi F (1996) Surf Coat Technol 88: 197
9. Ramesham R, Rose MF (1998) Thin Solid Films 320: 223
10. Zaitsev AM, Kosaca G, Richarz B, Raiko V, Job R, Fries T, Fahrner WR (1998) Diamond Relat Mater 7: 1108
11. van Enckevort WJP, Van Halewijn HJ (1994) In: Davies G (ed) Properties and growth of diamond. INSPEC, London, p 293
12. Okuzumi F, Yang CF, Yishikawa M (1995) In: Feldman A, Tzeng Y, Yarbrough WA, Yoshikawa M, Murukawa M (eds) 3rd international conference on applied diamond films and related materials. (Special publication 889) NIST, Washington, p 201
13. Okuzumi F, Yang CF, Yishikawa M (1995) Diamond Films Technol 4: 233
14. Yoshikawa M (1990) SPIE Proc Ser 1325: 210
15. Weima JA, Zaitsev AM, Job R, Kosaca GC, Blum F, Grabosch G, Fahrner WR, Knopp J (1999) Nano-polishing and subsequent characterization of CVD polycrystalline diamond films. In: Proceedings of the 25th annual conference of the IEEE Industrial Electronics Society, San Jose, Calif, p 50
16. Weima JA, Zaitsev AM, Job R, Kosaca GC, Blum F, Grabosch G, Fahrner WR, Knopp J (2000) J Solid State Electrochem 4: (in press)