Surface characterization of diamond films polished by thermomechanical polishing method

Thin Solid Films

Volumn 279, Issue 1-2, 1996, Pages 110-114

  Choi, S K ^a   Jung, D Y ^a   Kweon, S Y ^a   Jung, S K ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Diamond film; Graphitization; Hot filament CVD; Thermomechanical polishing

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CHARACTERIZATION; CHEMICAL VAPOR DEPOSITION; COMPOSITION; GRAPHITIZATION; POLISHING; RAMAN SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY; SURFACE STRUCTURE; SURFACES; THERMOMECHANICAL TREATMENT; X RAY DIFFRACTION;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION; HOT IRON PLATE; THERMOMECHANICAL POLISHING;

DIAMOND FILMS;

EID: 0030168807     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)08157-7     Document Type: Article

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