Hot-iron-metal polishing machine for CVD diamond films and characteristics of the polished surfaces

Surface and Coatings Technology

Volumn 88, Issue 1-3, 1997, Pages 197-203

  Yoshikawa, Masanori ^a   Okuzumi, Fuminori ^a  

^a Tokyo Institute of Technology ^*  (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND CUTTING TOOLS; DIAMOND FILMS; PLASMA ETCHING; POLISHING MACHINES;

DAMAGED DIAMOND FILM; DIAMOND WHEEL; HOT-IRON-METAL POLISHING;

POLISHING;

EID: 0030737362     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)02899-X     Document Type: Article

References (3)

1. B. Bhushan, V.V. Subramaniam and B.K. Gupta, Polishing of diamond films, Diamond Films Technol., 4(2), (1994) 71-97.
2. M. Yoshikawa, Development and performance of a diamond film polishing apparatus with hot metal, The International Society for Optical Engineering, Vol. 1325, Diamond Optics III, 1990, 210-221.
3. H. Tokura, C. Yang and M Yoshikawa, Study on the polishing of chemical vapour deposited diamond film, Thin Solid Films, 212 (1992) 49-55.