In situ investigations of thin film formation by reactive sputtering

Physica Scripta T

Volumn T115, Issue , 2005, Pages 963-965

  Bruder, K ^a   Keil, P ^a   Lutzenkirchen Hecht D ^a   Frahm, R ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRON SPUTTERING; REACTIVE SPUTTERING; SURFACE STRUCTURE; X RAY ABSORPTION SPECTROSCOPY;

GRAZING INCIDENCE REFLECTION; MAGNETRON SOURCE;

THIN FILMS;

EID: 22944440157     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1238/Physica.Topical.115a00963     Document Type: Article

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