Pulsed laser crystallization of very thin silicon films

Thin Solid Films

Volumn 487, Issue 1-2, 2005, Pages 63-66

  Sameshima, T ^a   Watakabe, H ^a   Andoh, N ^a   Higashi, S ^b  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

^b HIROSHIMA UNIVERSITY   (Japan)

Author keywords

Crystallization; Disordered states; Nano crystalline; Photoluminescence

Indexed keywords

ANNEALING; CRYSTALLIZATION; EXCIMER LASERS; NANOSTRUCTURED MATERIALS; PHOTOLUMINESCENCE; RAMAN SCATTERING; SILICON; THIN FILMS;

DISORDERED STATES; LASER ENERGY; NANO-CRYSTALLINE; OPTICAL EXTINCTION COEFFICIENTS;

PULSED LASER APPLICATIONS;

EID: 22944470162     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.01.036     Document Type: Conference Paper

References (21)

1. R.F. Wood, and C.E. Giles Phys. Rev., B 23 1981 2923
2. R.F. Wood, and C.E. Giles Phys. Rev., B 23 1981 5555
3. D.H. Lowndes, G.H. Kirkpatrick Jr., S.J. Pennycook, S.P. Withrow, and D.N. Mashburn Appl. Phys. Lett. 48 1986 1389
4. P.L. Liu, R. Yen, N. Bloembergen, and R.T. Hodson Appl. Phys. Lett. 34 1979 864
5. R. Tsu, R.T. Hodgson, T.Y. Tan, and J.E. Baglin Phys. Rev. Lett. 42 1979 1356
6. T.F. Deutsch, J.C.C. Fan, C.W. Turner, R.L. Chapman, D.J. Ehrlich, and R.M. Osgood Jr. Appl. Phys. Lett. 38 1981 144
7. S. Higashi, and T. Sameshima Jpn. J. Appl. Phys. 40 2001 480
8. T. Sameshima, S. Usui, and M. Sekiya IEEE Electron Device Lett. EDL-7 1986 276
9. K. Sera, F. Okumura, H. Uchida, S. Itoh, S. Kaneko, and K. Hotta IEEE Trans. Electron Devices 36 1989 2868
10. H. Kuriyama, T. Kuwahara, S. Ishida, T. Nohda, K. Sano, H. Iwata, S. Noguchi, S. Kiyama, S. Tsuda, S. Nakano, M. Osumi, and Y. Kuwano Jpn. J. Appl. Phys. 31 1992 4550
11. E.L. Mathé, J.G. Maillou, A. Naudon, E. Fogarassy, M. Elliq, and S. De Unamuro Appl. Surf. Sci. 43 1989 142
12. A. Kohno, T. Sameshima, N. Sano, M. Sekiya, and M. Hara IEEE Trans. Electron Devices ED-42 1995 251
13. S. Uchikoga, and N. Ibaraki Thin Solid Films 383 2001 19
14. S. Higashi, K. Ozaki, K. Sakamoto, Y. Kano, and T. Sameshima Jpn. J. Appl. Phys. 38 1999 L857
15. S. Higashi, D. Abe, S. Inoue, and T. Shimoda Jpn. J. Appl. Phys. 40 2001 4171
16. T. Sameshima, and S. Usui Appl. Phys. Lett. 59 1991 2724
17. T. Sameshima, and M. Satoh Jpn. J. Appl. Phys. 36 1997 L687
18. L.V. Gurvich, I.V. Veyts, Thermodynamic properties of individual substances, Hemisphere Publishing Corporation, New York, (1991) p. 237, 308.
19. T. Sameshima, K. Saitoh, N. Aoyama, S. Higashi, M. Kondo, and A. Matsuda Jpn. J. Appl. Phys. 38 1999 1892
20. H. Richter, Z.P. Wang, and L. Ley Solid State Commun. 39 1981 625
21. G. Viera, S. Huet, and L. Boufendi J. Appl. Phys. 90 2001 4175