Fabrication of vanadium oxide micro-optical switches

Sensors and Actuators, A: Physical

Volumn 122, Issue 1 SPEC. ISS., 2005, Pages 108-112

  Wang, Hongchen ^a   Yi, Xinjian ^a   Chen, Sihai ^a   Fu, Xiaochao ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Insertion loss; Optical switch; Semiconductor to metal phase transition; Vanadium oxide thin film

Indexed keywords

FABRICATION; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MILLIMETER WAVES; PHASE TRANSITIONS; STOICHIOMETRY; THIN FILMS; VANADIUM COMPOUNDS;

INSERTION LOSS; POWER CONSUMPTION; SEMICONDUCTOR-TO-METAL PHASE TRANSITION; VANADIUM OXIDE THIN FILMS;

OPTICAL SWITCHES;

EID: 22844448701     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.03.063     Document Type: Article

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