MOEMS pressure sensors for propulsion applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4178, Issue , 2000, Pages 380-386

  Boyd, Joseph T ^a   Dasgupta, Samhita ^b   Jackson, Howard E ^c  

^a University of Cincinnati   (United States)

^b UNIVERSITY OF CINCINNATI   (United States)

^c WRIGHT PATTERSON AIR FORCE BASE   (United States)

Author keywords

Dynamic response; Fabry perot; Fiber optic; Micromachined; Pressure sensors; Sensor arrays

Indexed keywords

PRESSURE SENSORS; PROPULSION; SHOCK TUBES;

HARSH ENVIRONMENT; HIGH-SPEED APPLICATIONS; MEMS PRESSURE SENSOR; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; MONOLITHIC ARRAYS; PROPULSION APPLICATIONS; PROPULSION SYSTEM; SPATIAL CHARACTERIZATION;

MOEMS;

EID: 22644432696     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.396511     Document Type: Conference Paper

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