Processing of complex microsystems: A micro mass spectrometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue I, 1999, Pages 562-571

  Siebert, P ^a   Petzold, G ^a   Mueller, J ^a  

^a HAMBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRON SOURCES; ETCHING; FABRICATION; IONIZATION; MASS SPECTROMETERS; PHOTORESISTS; THERMAL STRESS;

MICRO MASS SPECTROMETERS; MICROSTRUCTURING;

MICROELECTROMECHANICAL DEVICES;

EID: 0032688088     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (12)