Shape and thermal effects of metal films on stress-induced bending of micromachined bilayer cantilever

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 5 A, 2005, Pages 3180-3186

  Kuo, Ju Nan ^a   Lee, Gwo Bin ^a   Pan, Wen Fung ^a   Lee, Huei Huang ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Corner mirror; Microcantilever; Residual stress; Shape effect; Thermal effect

Indexed keywords

BENDING (DEFORMATION); CANTILEVER BEAMS; COMPUTER SIMULATION; ELASTIC MODULI; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RESIDUAL STRESSES; THERMAL EFFECTS; THERMAL EXPANSION;

CORNER MIRRORS; FINITE-ELEMENT SIMULATIONS; MICROCANTILEVER; SHAPE EFFECT;

METALLIC FILMS;

EID: 22544478782     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.3180     Document Type: Article

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