In-channel micromechanical drag flow sensor with electronic readout

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 307-310

  Radhakrishnan, Shankar ^a   Lal, Amit ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DRAG; REYNOLDS NUMBER; SENSORS; STRAIN; TEMPERATURE; THERMAL NOISE;

DRAG FORCES; ELECTRONIC READOUT; IN CHANNEL MICROBEAM FLOW SENSOR;

CHANNEL FLOW;

EID: 0037480692     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Niklas Svedin, Edvard Kalvesten, Erik Stemme, and Goran Stemme, "A new Silicon gas-flow sensor based on lift force", JMEMS, Vol. 7 No. 3, 1998, pp. 303-8.
2. Shankar Radhakrishnan, Harun Solak and Amit Lal, "In-channel microbeam flow sensor using drag forces", MicroTAS 2001, pp. 179-80.
3. A. Meddis, "Simulation of mechanical to neural transduction in the auditory receptor", J Acous. Soc. Am., Vol 79, 1986, pp. 702-11.
4. Paul A. Longwell, "Mechanics of fluid flow", New York, McGraw-Hill, 1996 Des: xv, 433 p. illus. 24 cm.
5. I.N. Sneddon, "Note on a boundary value problem of Reissner and Sagoci", J. App. Phy., Vol 18, 1947, pp 130-2.
6. S. Wu et, Q. Lin and Y. Yuen, "MEMS Flow sensors for nano-fluidic applications", MEMS 2000, pp. 745-750.