Micro gas bearings fabricated by deep X-ray lithography

Microsystem Technologies

Volumn 10, Issue 6-7, 2004, Pages 456-461

  Kim, D ^a   Lee, S ^a   Jin, Y ^b   Desta, Y ^b   Bryant, M D ^a   Goettert, J ^b  

^a The University of Texas at Austin   (United States)

^b LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATING; FRICTION; HYDRODYNAMICS; MICROMACHINING; REACTIVE ION ETCHING; X RAY LITHOGRAPHY;

BEARING SURFACES; MICRO FABRICATION TECHNOLOGY; MICRO GAS BEARINGS; MONOLITHIC STRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 10044228647     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0369-4     Document Type: Conference Paper

References (8)

1. Beerschwinger U; Reuben RL; Yang SJ (1997) Frictional study of motor bearings. Sensors Actuators 63: 229-241
2. Tanner DM (2000) Reliability of surface micromachined microelectromechanical actuators. Invited keynote at the 22nd international conference in microelectronics, Nis, Yugoslavia, pp. 97-104
3. Frechette LG; Nagle SF; Ghodssi R; Umans SD; Schmidt MA; Lang JH (2001) An electrostatic induction micromotor supported on gas-lubricated bearings. IEEE MEMS 2001
4. Pan C; Kim D; Bryant MD (2003) Dynamic analysis of the long plain journal bearing in the nanotechnology environment. ISCORMA-2
5. Kim D; Lee S; Bryant MD; Ling FF (2003) Static hydrodynamic performance of micro gas bearing systems fabricated by deep X-ray lithography. Proceedings of STLE/ASME International Tribology Conference, Oct. 2003, Ponte Vendra, Florida, USA
6. Desta YM; Bednazik M; Bryant MD; Goettert J; Jian L; Jin Y; Kim D; Lee S; Loechel B; Scheunemann H; Peng Z (2003) Borosilicate glass based X-ray masks for LIGA microfabrication. SPIE's Micromachining Microfabrication
7. Pantenburg FJ; Achenbach S; Mohr J (1998) Characterization of defects in very high deep-etch X-ray lithography micro-structures. Microsys Technol 4: 89-93
8. Coane P; Giasolli R; Ledger S; Lian K; Ling Z; Goettert J (2000) Fabrication of HARM structure by deep X-ray lithography using graphite mask technology. Microsys Technol 6: 94-98