Modeling of Electro-Mechanical Coupling Problem using the Finite Element Formulation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5049, Issue , 2003, Pages 349-360

  Rochus, Véronique ^a   Rixen, Daniel ^b   Golinval, Jean Claude ^a  

^a UNIVERSITY OF LIÈGE   (Belgium)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Finite Element Method (FEM); Micro Electro Mechanical Systems (MEMS); Non Linearity; Strong Electro Mechanical Coupling

Indexed keywords

CAPACITORS; COUPLINGS; ELECTRIC POTENTIAL; ELECTROSTATICS; FINITE ELEMENT METHOD; FREE ENERGY; FREQUENCIES; ITERATIVE METHODS; RELAXATION PROCESSES; STIFFNESS;

MECHANICAL FIELDS;

MICROELECTROMECHANICAL DEVICES;

EID: 0242525221     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482820     Document Type: Conference Paper

References (9)

1. W. Lee, K. Kwon, B. Kim, J. Cho, and S. Young, "Frequency-shifting analysis of electrostatically tunable micro-mechanical actuator," Journal of Modeling and Simulation of Microsystems, Vol.2, No.1, pp. 83-88, 2001.
2. M. Crisfield, Non-Linear Finite Element Analysis of Solids and Structures, John Wiley, 1991.
3. T. Ikeda, Fundamentals of piezoelectricity, OXFORD, 1996.
4. J. Warren, Nonlinear Stability Analysis of Frame-Type Structures with Random Geometric Imperfections using a Total-Lagrangian Finite Element Formulation, 1997.
5. V. Rochus, P. Duysinx, and J. Golinval, "Finite element analysis of the electro-mechanical coupling in mems," ACOMEN 2002, Second international conference on advanced computational method in engineering, 2002.
6. P. Hammond, Electromagnetism for Engineers, Pergamon, 1986.
7. E. Duran, Electrostatique, Massen et Cie, 1964.
8. S. Pamidighantam, R. Puers, and H. A. C. Tilmans, "Pull-in voltage analysis of fixed-fixed beams," proc. MME2001, pp. 269-272, 2001.
9. W. C. Young, Roark's Formulas for Stress and Strain, Mc. Graw-Hill, 1989.