Dynamics modeling of microbeams under electrostatic load

DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

Volumn , Issue , 2003, Pages 181-186

  Brusa, E ^b   De Bona, F ^b   Gugliotta, A ^a   Soma A ^a  

^a POLITECNICO DI TORINO   (Italy)

^b UNIVERSITY OF UDINE   (Italy)

Author keywords

Band pass filters; Communication switching; Electrostatic actuators; Frequency estimation; Interpolation; Motion analysis; Nonlinear equations; Resonance; Telecommunication switching; Voltage

Indexed keywords

EID: 84945973717     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2003.1287032     Document Type: Conference Paper

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