Fabrication of silicon molds for polymer optics

Journal of Micromechanics and Microengineering

Volumn 13, Issue 4, 2003, Pages

  Nilsson, D ^a   Jensen, S ^a   Menon, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ETCHING; MICROSTRUCTURE; OPTICAL DEVICES; SURFACE ROUGHNESS;

MICROCAVITIES;

POLYMERS;

EID: 0037765114     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/4/309     Document Type: Conference Paper

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