MEMS electrostatic actuators for optical switching applications

Conference on Optical Fiber Communication, Technical Digest Series

Volumn 54, Issue 3, 2001, Pages

  Grade, J D ^a   Jerman, H ^a  

^a Iolon Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES; FIBER OPTICS; OPTICAL COMMUNICATION; OPTICAL FIBERS; OPTICAL SWITCHES; REACTIVE ION ETCHING;

DEEP REACTIVE ION ETCHING;

ELECTROSTATIC ACTUATORS;

EID: 18344409163     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. Micromachined free-space integrated micro-optics
2. Micromachined polysilicon microscanners for barcode readers
3. Automated assembly of flip-up micromirrors
4. A large-deflection electrostatic actuator for optical switching applications
5. Comb-drive actuators for large displacements