Integrated optics devices for long ranging surface plasmons: Fabrication challenges and solutions

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5720, Issue , 2005, Pages 173-186

  Mattiussi, Greg ^a   Lahoud, Nancy ^a   Charbonneau, Robert ^a   Berini, Pierre ^a,b  

^a Spectalis Corp   (Canada)

^b UNIVERSITY OF OTTAWA   (Canada)

Author keywords

Integrated optics; Lithium niobate; Metal waveguides; Plasmons

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC CONDUCTIVITY; FERROELECTRIC CERAMICS; GLASS; INTERFACES (MATERIALS); LIGHT EMITTING DIODES; LITHIUM NIOBATE; MICROSCOPIC EXAMINATION; NANOTECHNOLOGY; SURFACE PLASMON RESONANCE; WAVEGUIDES;

METAL WAVEGUIDES; MWG; PROPAGATION LOSSES; SURFACE PLASMONS;

INTEGRATED OPTICS;

EID: 21844446096     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600788     Document Type: Conference Paper

References (21)

1. S.S. Yee (Ed.), "Surface Plasmon Resonance (SPR) Optical Sensors, Current Technology and Applications", Sensors and Actuators, B54, No. 1 - 25, pp. 1 - 190, January 1999
2. X. Luo and T. Ishihara, "Surface plasmon resonant interference nanolithography technique", Applied Physics Letters, 84, No. 2, pp. 4780 - 4782, 7 June 2004
3. M. Sprecht, J.D. Pedarnig, W.M. Heckl, and T.W. Hänsch, "Scanning Plasmon Near-Field Microscope", Physical Review Letters, 68, No. 4, pp. 476 - 479, 27 January 1992
4. R.B.G. de Hollander, N.F. van Hulst, and R.P.H. Kooyman, "Near field plasmon and force microscopy", Ultramicroscopy, 57, pp. 263 - 269, 1995
5. W.P. Hu, S.-J. Chen, K.-T. Huang, J.H. Hsu, W.Y. Chen, G.L. Chang, and K.-A. Lai, "A novel ultrahigh-resolution surface plasmon resonance biosensor with and Au nanocluster-embedded dielectric film", Biosensors and Bioelectronics, 19, pp. 1465 - 1471, 2004
6. K.R. Catchpole, S. Pillai, and K.L. Lin, "Novel Applications for Surface Plasmons in Photovoltaics", The 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, May 12-16, 2003
7. D.J. Bergman and M.I. Stockman, "Can We Make a Nanoscopic Laser ?", Laser Physics, 14, No. 3, pp. 409 - 411, 2004
8. K. Okamoto, I. Niki, A. Shvartser, Y. Narukawa, T. Mukai, and A. Scherer, "Surface-plasmon-enhanced light emitters based on InGaN quantum wells", Nature Materials, 3, pp. 601 - 605, September 2004
9. P. Berini, "Plasmon-polariton modes guided by a metal film of finite width", Optics Letters, 24, No. 15, pp. 1011-1013, August 1 1999
10. P. Berini, "Plasmon-polariton waves guided by thin lossy metal films of finite width: Bound modes of symmetric structures", Physical Review B, 61, No. 15, pp. 10484 - 10503, 15 April 2000
11. R. Charbonneau, P. Berini, E. Berolo, and E. Lisicka-Shrzek, "Experimental observation of plasmon-polariton waves supported by a thin metal film of finite width", Optics Letters, 25, No. 11, pp. 844 - 846, 1 June 2000
12. R. Charbonneau, P. Berini, E. Berolo, and E. Lisicka-Shrzek, "Long-Range Plasmon-Polariton Wave Propagation in Thin Metal Films of Finite-Width Excited Using an End-Fire Technique", International Conference on the Application of Photonic Technology, Proc. SPIE, 4087, pp. 534-540, June 2000.
13. P. Berini, "Plasmon-polariton modes guided by a metal film of finite width bounded by different dielectrics", Optics Express, 7, No. 10, pp. 329 - 335, 6 November 2000
14. P. Berini, "Plasmon-polariton waves guided by thin lossy metal films of finite width: Bound modes of asymmetric structures", Physical Review B, 63, 125417, 2001
15. T.S. Kuan, C.K. Inoki, O.S. Oehlein, K. Rose, Y.-P. Zhao, G.-C. Wang, S.M. Rossnagel, and C.Cabral, "Fabrication and Performance Limits of Sub-0.1 μm Cu Interconnects", Mat. Res. Soc. Symp. Proc., Vol. 612, pp. D7.1.1 - D7.1.8, 2000
16. C. Reale, "Optical Constants of Vacuum Deposited Thin Metal Films in the Near Infrared", Infrared Physics, 10, pp. 175-181, 1970
17. S.M. Rossnagel and T.S. Kuan, "Alteration of Cu conductivity in the size effect regime", J. Vac. Sci. Technol. B, 22(1), pp. 240 - 247, Jan / Feb 2004
18. See, for example: http://www.crystaltechnology.com/LN Optical Wave Sub.pdf
19. M. Levy, R.M. Osgood Jr., R. Liu, L.E. Cross, G.S. Cargill III, A. Kumar, and H. Bakhru, "Fabrication of single-crystall lithium niobate films by crystal ion slicing", Appl. Phys. Lett., 73, 16, pp. 2293 - 2295, 19 October 1998
20. 3 thin films", 76, 11, pp. 1407 - 1409, 13 March 2000
21. M. Solal, Th. Pastureaud, S. Ballandras, B. Aspar, B. Biasse, W. Daniau, J.M. Hode, S. Calisti, V. Laude, "Oriented lithium niobate layers transferred on 4" (100) silicon wafer for RF SAW devices", 2002 IEEE Ultrasonics Symposium, pp. 131 - 134, 2002