High-Q microring resonator for biochemical sensors

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5728, Issue , 2005, Pages 83-92

  Guo, Junpeng ^a   Shaw, Michael J ^a   Vawter, G Allen ^a   Hadley, G Ronald ^a   Esherick, Peter ^a   Sullivan, Charles T ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

High Q factor; Microring resonator; Silicon photonics

Indexed keywords

BIOSENSORS; ETCHING; HYDROGEN BONDS; INTERFEROMETERS; PHOTOLITHOGRAPHY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; Q FACTOR MEASUREMENT; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SILICA; SILICON NITRIDE; ULTRAVIOLET RADIATION;

BENDING LOSS; HIGH-Q FACTOR; MICRORING RESONATOR; SILICON PHOTONICS;

OPTICAL RESONATORS;

EID: 21844440584     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.589467     Document Type: Conference Paper

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