Photonic circuits integrated with CMOS compatible photodetectors

Optical Materials

Volumn 17, Issue 1-2, 2001, Pages 201-205

  Cristea, Dana ^a   Craciunoiu, F ^a   Modreanu, M ^a   Caldararu, M ^b   Cernica, I ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b ECOSEN Ltd   (Romania)

Author keywords

Microsensors; Photodetectors; Photonic integrated circuits; Waveguides

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CMOS INTEGRATED CIRCUITS; DOPING (ADDITIVES); FIELD EFFECT TRANSISTORS; INTEGRATED OPTOELECTRONICS; INTERFEROMETERS; MICROMACHINING; MICROSENSORS; OPTICAL WAVEGUIDES; PHOTOTRANSISTORS; SILICA; SILICON; SILICON NITRIDE; SOL-GELS; TRANSDUCERS;

PHOTONIC INTEGRATED CIRCUITS;

PHOTODETECTORS;

EID: 0035360489     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-3467(01)00045-3     Document Type: Conference Paper

References (7)

1. Integrated optics for chemo-optical sensors