Wireless bimorph micro-actuators by pulsed laser heating

Sensors and Actuators, A: Physical

Volumn 121, Issue 1, 2005, Pages 35-43

  Han, Li Hsin ^a   Chen, Shaochen ^a  

^a The University of Texas at Austin   (United States)

Author keywords

Laser; MEMS; Micro cantilever; Model; Pulse; Wavelength

Indexed keywords

CONTINUOUS WAVE LASERS; DEFORMATION; ELECTRIC PROPERTIES; GOLD; HEATING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; MODELS; POLYSILICON; PULSED LASER APPLICATIONS; THERMAL EXPANSION;

BIMORPH MICRO-CANTILEVERS (BMC); PULSED LASER HEATING; STRUCTURAL DEFORMATION; WAVELENGTH PULSES;

MICROACTUATORS;

EID: 21744453062     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.12.012     Document Type: Article

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