Laser-based fabrication of polymer micro-fluidic devices

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2004, Pages 293-298

  Kim, Joohan ^a   Xu, Xianfan ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; COOLING; FABRICATION; GLASS; LASERS; MICROELECTRONICS; PHOTOLITHOGRAPHY; POLYMERS;

LASER-BASED FABRICATION; MICRO-FLUIDIC DEVICES; MICRO-SYSTEMS; POLYMER-MICRO DEVICES;

FLUIDIC DEVICES;

EID: 21644465165     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-62025     Document Type: Conference Paper

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