Laser ablation of AlN films grown on sapphire substrate

Journal of Applied Physics

Volumn 97, Issue 8, 2005, Pages

  Safadi, Mona R ^a   Thakur, Jagdish S ^a   Auner, Gregory W ^a  

^a Wayne State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION THRESHOLD; CONDUCTION-BAND ELECTRONS; LASER ENERGY ABSORPTION; LATTICE PHONONS;

ALUMINUM NITRIDE; ELECTRON GAS; EPITAXIAL GROWTH; EXCIMER LASERS; FILM GROWTH; LASER ABLATION; MOLECULAR BEAM EPITAXY; SAPPHIRE; SINGLE CRYSTALS; SUBSTRATES;

THIN FILMS;

EID: 21444439430     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1863420     Document Type: Article

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