Excimer laser ablation of aluminum nitride

Journal of Materials Research

Volumn 12, Issue 1, 1997, Pages 218-225

  Lumpp, Janet K ^a   Allen, Susan D ^b  

^a UNIVERSITY OF KENTUCKY   (United States)

^b FLORIDA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY GAP; EXCIMER LASERS; LASER ABLATION; LASER PULSES; LIGHT ABSORPTION; PRESSURE;

ABLATION RATE; ALUMINUM NITRIDE; FLUENCE; METALLIC LAYER;

ALUMINUM COMPOUNDS;

EID: 0030781837     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0029     Document Type: Article

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