Optical properties of AlN determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry data

Journal of Materials Research

Volumn 14, Issue 11, 1999, Pages 4337-4344

  Jones, D J ^a   French, R H ^a   Mullejans H ^b,c   Loughin, S ^a   Dorneich, A D ^b   Carcia, P F ^a  

^a DUPONT COMPANY   (United States)

^b MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

^c JOINT RESEARCH CENTRE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; ELECTRONIC STRUCTURE; ELLIPSOMETRY; OPTICAL PROPERTIES; ULTRAVIOLET SPECTROSCOPY;

ALUMINUM NITRIDE;

ALUMINUM COMPOUNDS;

EID: 0033222069     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0587     Document Type: Article

References (55)

1. G.A. Slack, J. Phys. Chem. Solids 34, 321 (1973).
2. G.A. Slack and T.F. McNelly, J. Cryst. Growth 34, 263 (1976).
3. G.A. Slack and T.F. McNelly, J. Cryst. Growth 42, 560 (1977).
4. L.M. Sheppard, Ceram. Bull. 69, 1801 (1990).
5. B. Hejda and K. Hauptmanová, Phys. Status Solidi 36, K95 (1969).
6. D. Jones and A.H. Lettington, Solid State Commun. 11, 701 (1972).
7. A. Kobayashi, O.F. Sankey, S.M. Volz, and J.D. Dow, Phys. Rev. B 28, 935 (1983).
8. M-Z. Huang and W-Y. Ching, J. Phys. Chem. Solids 46, 977 (1985).
9. W-Y. Ching and B.N. Harmon, Phys. Rev. B 34, 5305 (1986).
10. R.V. Kasowski and F.S. Ohuchi, Phys. Rev. B 35, 9311 (1987).
11. Y-N. Xu and W-Y. Ching, Phys. Rev. B 48, 4335 (1993).
12. E. Ruin, S. Alvarez, and P. Alimony, Phys. Rev. B 49, 7115 (1994).
13. A.K. Saloon, A. Kashyap, T. Nautiyal, and S. Auluck, Solid State Commun. 94, 1009 (1995).
14. F.S. Ohuchi, J. Phys. 49(10), C5-783 (1988); J. Appl. Phys. 62, 2286 (1987).
15. F.S. Ohuchi, J. Phys. 49(10), C5-783 (1988); J. Appl. Phys. 62, 2286 (1987).
16. P.F. Carcia, R.H. French, K, Sharp, J.S. Meth, and B.W. Smith, Proc. SPIE-Int. Soc. Opt. Eng. 2884, 255 (1996).
17. P.F. Carcia, R.H. French, M.H. Reilly, M.F. Lemon, and D.J. Jones, Appl. Phys. Lett. 70, 2371 (1997).
18. L.E. McNeil, M. Grimsditch, and R.H. French, J. Am. Ceram. Soc. 76, 1132 (1993).
19. M. Morita, K. Tsubouchi, and N. Mikoshiba, Jpn. J. Appl. Phys. 21, 1102 (1982).
20. G. Radhakrishnan, J. Appl. Phys. 78, 6000 (1995).
21. H. Yamashita, K. Fukui, S. Misawa, and S. Yoshida, J. Appl. Phys. 50, 896 (1979).
22. T.L. Chu and R.W. Elm, Jr., J. Electrochem. Soc. 122, 995 (1975).
23. C.R. Aita, C.J.G. Kubiak, and F.Y.H. Shin, J. Appl. Phys. 66, 4360 (1989).
24. R. Zarwasch, E. Rille, and H.K. Pulker, J. Appl. Phys 71, 5275 (1992).
25. J.C. Kaplan and R.A. Gerhardt, J. Mater. Res. 9, 2209 (1994).
26. P.B. Perry and R.F. Rutz, Appl. Phys. Lett. 33, 319 (1978).
27. J. Bauer, L. Biste, and D. Bolze, Phys. Status Solidi A 39, 173 (1977).
28. N.V. Barovskii, U.D. Kudakov, E.B. Sokolov, and V.G. Sredin, Izv. Akad. Nauk SSSR, Neorg. Mater. 19, 1589-1591 (1983) [translation by Plenum Publishing (1984)].
29. Q. Guo and A. Yoshida, Jpn. J. Appl. Phys. 33, 2453 (1994).
30. G.A. Slack, Advanced Materials for Optical Windows (General Electric Technical Information Series No. 79CRD071, under ONR Contract N00014-77-C-0649, Schenectady, NY, June 1979).
31. V.N. Meleshkin, V.V. Mikhailin, V.E. Oranovskii, P.A. Orekhanov, I. Pasternák, S. Pacesova, A.S. Salamatov, M.V. Fok, and A.S. Yarov, in Synchrotron Radiation, edited by N.G. Basov [Proceedings (Trudy) of the P.N. Lebendev Physics Inst., Moscow, c. 1975], Vol. 80, pp. 169-174.
32. V.V. Michailin, V.E. Oranovskii, S. Pacesová, J. Pastrnák, and A.S. Salamatov, Phys. Status Solidi B 55, K51 (1973).
33. M. Gautier, J.P. Duraud, and C. LeGressus, J. Appl. Phys. 61, 574 (1987).
34. C.G. Olson, J.H. Sexton, D.W. Lynch, A.J. Bevolo, H.R. Shanks, B.N. Harmon, W.Y. Ching, and D.M. Wieliczka, Solid State Commun. 56, 35 (1985).
35. A.D. Dorneich, R.H. French, H. Müllejans, S. Loughin, and M. Rühle, J. Microsc. 191(3), 286-296 (1988); R.H. French, H. Müllejans, D.J. Jones, J. Am. Ceram. Soc. 81, 2549 (1998).
36. A.D. Dorneich, R.H. French, H. Müllejans, S. Loughin, and M. Rühle, J. Microsc. 191(3), 286-296 (1988); R.H. French, H. Müllejans, D.J. Jones, J. Am. Ceram. Soc. 81, 2549 (1998).
37. S. Loughin and R.H. French, in Properties of Croup III Nitrides, edited by J.H. Edgar (Electronic Materials Information Service, INSPEC, Institution of Electrical Engineers, London, 1994), pp. 175-189.
38. S. Loughin, R.H. French, in Handbook of Optical Constants of Solids, edited by E. Palik (Academic Press, New York, 1998), Vol. III, pp. 373-401.
39. S. Loughin, R.H. French, W.Y. Ching, Y.N. Xu, and G.A. Slack, Appl. Phys. Lett. 63, 1182 (1993).
40. Shin-Etsu Chemical Co., Limited, Advanced Materials Division, 6-1,2 Chome Otemachi Chiyoda-ku, Tokyo.
41. B. Johs, R.H. French, F.D. Kalk, W.A. McGahan, and J.A. Woollam, Proc. SPIE-Int. Soc. Opt. Eng. 2253, 1098 (1994).
42. M.L. Bortz and R.H. French, Appl. Phys. Lett. 55, 1955 (1989).
43. R.H. French, Phys. Scr. 41(4), 404 (1990).
44. D.Y. Smith, in Handbook of Optical Constants of Solids, edited by E.D. Palik (Academic Press, New York, 1985), pp. 35-68.
45. S. Loughin, R.H. French, L.K. DeNoyer, W-Y. Ching, and Y-N. Xu, J. Phys. D 29, 1740 (1996).
46. R. de L. Kronig, J. Opt. Soc. Am. 12, 547 (1926); C.J. Gorter and R. de L. Kronig, Phys. III 9, 1009 (1936).
47. R. de L. Kronig, J. Opt. Soc. Am. 12, 547 (1926); C.J. Gorter and R. de L. Kronig, Phys. III 9, 1009 (1936).
48. H.A. Kramers, Atti. Congr. Int. Fis. Como. 2, 545 (1927).
49. M.L. Bortz and R.H. French, Appl. Spectrosc. 43, 1498 (1989).
50. W. Sellmeier II. Ann. Phys. Chem. 147, 525 (1872) (in German).
51. S. Jacoby, J. Kowalik, and J. Pizzo, Iterative Methods for Non-Linear Optimization Problems (Prentice-Hall, Englewood Cliffs, NJ, 1972).
52. F. Wooten, Optical Properties of Solids (Academic Press, San Diego, CA, 1972).
53. Duplex II Refractometer, Gem Instruments Corp., P.O. Box 2147, 1630 Stewart St., Santa Monica, CA 90406.
54. T. Tomiki, Y. Ganaha, T. Shikenbaru, T. Futemma, M. Yuri, Y. Aiura, S. Sato, H. Fukutani, H. Kato, T. Miyahara, A. Yonesu, and J. Tamashiro, J. Phys. Soc. Jpn. 62, 573 (1993).
55. T. Tomiki, Y. Ganaha, T. Shikenbaru, T. Futemma, M. Yuri, Y. Aiura, S. Sato, H. Fukutani, H. Kato, T. Miyahara, A. Yonesu, and J. Tamashiro, J. Phys. Soc. Jpn. 62, 1372 (1993).