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Volumn 43, Issue 2 B, 2004, Pages

Controlled Placement of Self-Organized Ge Dots on Patterned Si (001) Surfaces

Author keywords

Dots; Electron beam lithography; Ge; Mesas; Self organized; Si; Ultra high vacuum chemical molecular epitaxy

Indexed keywords

ALCOHOLS; ATOMIC FORCE MICROSCOPY; ELECTRON BEAM LITHOGRAPHY; EPITAXIAL GROWTH; QUANTUM THEORY; SILICON; SURFACE CHEMISTRY; ULTRAHIGH VACUUM;

EID: 2142821491     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.43.l247     Document Type: Article
Times cited : (1)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.