Depth profiling of light elements in PAMBE-grown GaN and helium-implanted titanium with heavy ion time-of-flight elastic recoil detection

Surface and Interface Analysis

Volumn 36, Issue 4, 2004, Pages 317-322

  Markwitz, A ^a,b   Kennedy, V J ^a,b   Durbin, S M ^b,c   Johnson, P B ^b,d   Mucklich A ^e   Dytlewski, N ^f  

^a GNS SCIENCE   (New Zealand)

^b MACDIARMID INSTITUTE FOR ADVANCED MATERIALS AND NANOTECHNOLOGY   (New Zealand)

^c UNIVERSITY OF CANTERBURY   (New Zealand)

^d VICTORIA UNIVERSITY OF WELLINGTON   (New Zealand)

^e INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^f AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

Author keywords

Depth profiling; GaN; He implanted Ti; HI ERDA; Nanoporous surfaces; Sputtering

Indexed keywords

GALLIUM NITRIDE; HELIUM; ION BEAMS; MOLECULAR BEAM EPITAXY; PLASMA APPLICATIONS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR GROWTH; SPUTTERING; THIN FILMS; TITANIUM; TOPOLOGY;

DEPTH PROFILING; HE-IMPLANTED TI; HI-ERDA; NANOPOROUS SURFACES;

SURFACE CHEMISTRY;

EID: 2142819446     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1691     Document Type: Article

References (26)

1. Chu WK, Mayer JW, Nicolet MA. Backs cattering Spectrometry. Academic Press: New York, 1978.
2. Tesmer JR, Nastasi M. Handbook of Modern Ion Beam Materials Analysis. Materials Research Society: Pittsburgh, PA 1995.
3. Martin JW, Cohen DD, Dytlewski N, Garton DB, Whitlow HJ, Russell GJ. Nucl. Instrum. Methods Phys. Res. 1994; B94: 277.
4. Markwitz A, White GV. Adv. Mater. 2001; 13: 1027.
5. Timmers H, Weijers TDM, Elliman RG, Uribasterra J, Whitlow HJ, Sarwe EL. Nucl. Instrum. Methods Phys. Res. 2002; B190: 428.
6. Kennedy VJ, Markwitz A, Bubendorfer A, Long N, Dytlewski N. Curr. Appl. Phys. in press.
7. Markwitz A, Bittar A, Törnquist J, Trompetter WJ, Dytlewski N, Cohen D, Proce. 6th NTA/VSA Conference, Lucas Heights, Australia, 24-26 November 1999; 24.
8. Bohne W, Lindner S, Röhrich J, Nucl. Instrum. Methods Phys. Res. 2002; B188: 55.
9. Ghosh S, Avasthi DK, Som T, Tripathi A, Kabiraj D, Ingale A, Mishra S, Ganesan V, Zhang S, Hong X, Nucl. Instrum. Methods Phys. Res. 2002; B190:164.
10. Ghosh S, Avasthi DK, Tripathi A, Srivastava SK, Nageswara Rao SVS, Som T, Mittal VK, Grüner F, Assmann W. Nucl. Instrum. Methods Phys. Res. 2002; B190:169.
11. Bolse W, Schattat B. Nucl. Instrum. Methods Phys. Res. 2002; B190: 173.
12. Dytlewski N, Evans PJ, Noorman JT, Garton DB, Cassidy DJ. Nucl. Instrum. Methods Phys. Res. 2002; B190: 199.
13. Borrmann T, McFarlane AJ, Markwitz A, Johnston JH, Dytlewski N. Adv. Mater. to be published.
14. Brockhoff AM, Arnoldbik WM, Habraken FHPM. Nucl. Instrum. Methods Phys. Res. 2002; B190: 226.
15. Franich RD, Johnston PN, Bubb IF, Dytlewski N, Cohen DD. Nucl. Instrum. Methods Phys. Res. 2002; B190: 252.
16. Martin JW, Cohen DD, Dytlewski N, Garton DB, Whitlow HJ, Russell GJ. Nucl. Instrum. Methods Phys. Res. 1994; B94: 277.
17. Markwitz A, Johnson PB, Gilberd PW, Collins GA, Cohen DD, Dytlewski N. Nucl Instrum. Methods Phys. Res. 2000; B161-163: 1048.
18. Markwitz A, Kennedy VJ, Dytlewski N, Pelicon P, Vickridge IC. 13th Nuclear Techniques of Analysis and 8th Vacuum Society of Australia Congress, 26-28 November 2003; Sydney, Australia. ISBN 0-9677217-9-X, 164-167.
19. Lide DR. CRC Handbook of Chemistry and Physics, 82nd edn. CRC Press: 2001; section 4, 58.
20. Christie VA, Liem SI, Reeves R, Kennedy VJ, Markwitz A, Durbin SM. Curr. Appl. Phys. in press.
21. Johnson PB, In Fundamental Aspects of Inert Gases in Solids, Evans JH, Donnelly SE (eds.). Plenum pass: New York, 1991; 167.
22. Markwitz A, Johnson PB, Gilberd PW, Collins GA, Cohen DD, Dytlewski N. Nucl. Instrum. Methods Phys. Res. 2000; B161/163: 1048.
23. Johnson PB, Gilberd PW, Markwitz A, Trompetter WJ, Collins GA, Short KT, Cohen DD, Dytlewski N. Surf. Coat. Technol. 2001; 136: 217.
24. Markwitz A, Johnson PB, Gilberd PW, Collins GA, Nucl. Instrum. Methods Phys. Res. 2002; B190: 718.
25. Johnson PB, Jones WR. J. Nucl. Mater. 1984; 120:125.
26. Johnson PB, Thomson RW, Reader K. J. Nucl. Mater. 1999; 273: 117.