In situ ERD analysis of sol-gel films during thermal processing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 199-202

  Dytlewski, N ^a   Evans, P J ^a   Noorman, J T ^a   Garton, D B ^a   Cassidy, D J ^a  

^a AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

Author keywords

Diffusion; Oxidation; Time of flight elastic recoil detection analysis; Titania sol gel

Indexed keywords

ANNEALING; DIFFUSION; HEAVY IONS; HYDROLYSIS; OXIDATION; REFRACTIVE INDEX; TITANIUM OXIDES;

HEAVY ION TIME-OF-FLIGHT RECOIL SPECTROMETRY;

SOL-GELS;

EID: 0036569165     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01244-7     Document Type: Conference Paper

References (5)