Study of the permeability of thin films of a-Si:H using MeV ion beams

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 226-230

  Brockhoff, A M ^a   Arnoldbik, W M ^a   Habraken, F H P M ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

Amorphous silicon; Elastic recoil detection; Hydrogen motion; Permeability; Radiation damage; Silicon nitride; TFT

Indexed keywords

AMORPHOUS SILICON; HEAVY IONS; HYDROGENATION; ION BEAMS; RADIATION DAMAGE; THIN FILMS;

ELASTIC RECOIL DETECTION;

SILICON NITRIDE;

EID: 0036570185     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01170-3     Document Type: Conference Paper

References (11)