SCOPUS 정보 검색 플랫폼

Advanced Materials

Volumn 13, Issue 12-13, 2001, Pages 1027-1030

Nitridation of silicon oxide layers studied with ion beam analysis on the nanometer scale

(2) Markwitz, A a White, G V b

a GNS SCIENCE (New Zealand)

b CALLAGHAN INNOVATION (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; HIGH TEMPERATURE PROPERTIES; NITROGEN; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SURFACES; THICKNESS MEASUREMENT;

ION BEAM ANALYSIS; NITRIDATION; SILICON OXIDE; SURFACE TOPOLOGY; TIME OF FLIGHT HEAVY ION ELASTIC RECOIL DETECTION ANALYSIS;

SILICON COMPOUNDS;

EID: 0035806587 PISSN: 09359648 EISSN: None Source Type: Journal
DOI: 10.1002/1521-4095(200107)13:12/13<1027::AID-ADMA1027>3.0.CO;2-S Document Type: Article

Times cited : (6)

References (14)

1
- 0004171405
- McGraw-Hill, New York
- (1969) Semiconductor Junctions and Devices
- Burford III, W.B.¹ Verner, H.G.²

2
- 0031625819
- (1998) Mater. Res. Soc. Symp. Proc. , vol.486 , pp. 175
- Rebohle, L.¹ Tyschenko, I.E.² Von Borany, J.³ Schmidt, B.⁴ Groetzschel, R.⁵ Markwitz, A.⁶ Yankov, R.A.⁷ Froeb, H.⁸ Skorupa, W.⁹

3
- 0004688954
- Proc. IPENZ Ann. Conf. IPENZ Inc. 1997 , vol.2 , pp. 307
- White, G.V.¹ Chen, C.Y.² Barris, G.C.³ Cooper, M.T.⁴ Sheppard, C.M.⁵ MacKenzie, K.J.D.⁶ Brown, I.W.M.⁷

5
- 0003466042
- Springer, Heidelberg
- (1991) Gmelin Handbook of Inorganic and Organometallic Chemistry Si: Suppl. 5C, Silicon Nitride in Microelectronics
- Krimmel, E.F.¹

6
- 0003978454
- Research Reports, ESPRIT, Project 369; Springer, Berlin
- (1991) LPCVD Silicon Nitride and Oxynitride Films , vol.1
- Habraken, F.H.P.M.¹

8
- 0003944822
- Prentice-Hall, Englewood Cliffs, NJ
- (1986) Fundamentals of Surface and Thin Film Analysis
- Feldman, L.G.¹ Mayer, J.W.²

9
- 0003419936
- Materials Research Society, Pittsburgh, PA
- (1995) Handbook of Modern Ion Beam Materials Analysis
- Tesmer, J.R.¹ Nastasi, M.²

10
- 0003569460
- Academic, San Diego, CA
- (1989) Ion Beam Materials Analysis
- Bird, J.R.¹ Williams, J.S.²

11
- 0003704829
- Wiley, New York
- (1995) Particle-Induced X-ray Emission Spectrometry
- Johansson, S.A.E.¹ Campbell, J.L.² Malmqvist, K.G.³

12
- 0004198677
- Academic, Boston, MA
- (1978) Backscattering Spectrometry
- Chu, W.K.¹ Mayer, J.W.² Nicolet, M.A.³

13
- 0000818585
- (1994) Nucl. Instrum. Methods B , vol.94 , pp. 277
- Martin, J.W.¹ Cohen, D.D.² Dytlewski, N.³ Garton, D.B.⁴ Whitlow, H.J.⁵ Russell, G.J.⁶

14
- 85033012574
- in press
- Microchim. Acta
- Markwitz, A.¹ White, G.V.² Trompetter, W.J.³ Brown, I.W.M.⁴ Dytlewski, N.⁵ Cohen, D.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.