Fabrication of a 3D differential-capacitive acceleration sensor by UV-LIGA

Sensors and Actuators, A: Physical

Volumn 77, Issue 1, 1999, Pages 14-20

  Qu, Wenmin ^a   Wenzel, Christian ^a   Gerlach, Gerald ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CAPACITORS; ETCHING; PHOTORESISTS; SENSORS;

ACCELERATION SENSORS; SURFACE MICROSTRUCTURING PROCESS;

ACCELEROMETERS;

EID: 0033362508     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00377-X     Document Type: Article

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