Micro-optical inertial sensors using silicon MEMS

IEEE Aerospace Conference Proceedings

Volumn 1, Issue , 1998, Pages 437-443

  Tien, Norman C ^a  

^a School of Operations Research and Industrial Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ALUMINUM COATINGS; POLYCRYSTALLINE MATERIALS; POLYSILICON; SURFACE MICROMACHINING; COMPUTER SIMULATION; DIFFRACTION GRATINGS; INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; OPTICAL FILTERS; SILICON SENSORS; VIBRATIONS (MECHANICAL);

INERTIAL SENSOR; INTERFEROMETRIC SENSOR; MASS SPRING SYSTEMS; MECHANICAL STRUCTURES; MICROOPTICAL SYSTEMS; OPTICAL INTENSITIES; POLYSILICON SURFACE-MICROMACHINING; VIBRATION MODES;

VIBRATIONS (MECHANICAL); OPTICAL SENSORS;

INTERFEROMETRIC SENSORS; MICRO OPTICAL INERTIAL SENSORS; OPTICALLY SENSED ACCELERATORS;

EID: 0031633307     PISSN: 1095323X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/AERO.1998.686942     Document Type: Conference Paper

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