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Surface and Coatings Technology

Volumn 173, Issue 1, 2003, Pages 111-115

Analytical and functional characterization of ultrathin carbon coatings for future magnetic storage devices

(5) Ohr, R a Jacoby, B a Gradowski, M V a Schug, C a Hilgers, H a

a IBM (Germany)

Author keywords

Areal storage density; Carbon overcoat; Filtered high current pulsed arc; Magnetic storage; Thin film analysis

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; MAGNETIC STORAGE; MAGNETRON SPUTTERING; PLASTIC DEFORMATION; SECONDARY ION MASS SPECTROMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

X-RAY REFLECTIVITY (XRR);

COATING TECHNIQUES;

CARBON; COATING; FILM; MAGNETIC DISC; THICKNESS;

EID: 0042239425 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00555-3 Document Type: Article

Times cited : (13)

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