Fabrication and dielectric properties of barium strontium titanate nano-particles/amorphous lead zirconate titanate composite thin film

Thin Solid Films

Volumn 485, Issue 1-2, 2005, Pages 22-26

  Tanase, Tomokazu ^a   Kobayashi, Yoshio ^a   Miwa, Takao ^b   Konno, Mikio ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

Coatings; Dielectric properties; Nanostructures and surface morphology

Indexed keywords

ANNEALING; BARIUM COMPOUNDS; COATINGS; CRYSTALLIZATION; MORPHOLOGY; NANOSTRUCTURED MATERIALS; PERMITTIVITY; SOLUTIONS; SURFACES;

COMPOSITE FILMS; LEAD ZIRCONATE TITANATE (PZT); METAL-ORGANIC SOLUTIONS; NANO-CRYSTALLINE PARTICLES;

THIN FILMS;

EID: 21244498123     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.03.031     Document Type: Article

References (23)

1. A. Okada J. Appl. Phys. 48 1977 2905
2. Y. Rao, S. Ogitani, P. Kohl, and C.P. Wong J. Appl. Polym. Sci. 83 2002 1084
3. B.A. Tuttle, T.J. Headley, B.C. Bunker, R.W. Schwartz, T.J. Zender, C.L. Hernandez, D.C. Goodnow, R.J. Tissot, J. Michael, and A.H. Carim J. Mater. Res. 7 1992 1876
4. J. Chen, K.R. Udayakumar, K.G. Brooks, and L.E. Cross J. Appl. Phys. 71 1992 4465
5. S.M. Zanetti, P.R. Bueno, E. Leite, E. Longo, and J.A. Varela J. Appl. Phys. 89 2001 3416
6. C.K. Kwok, and S.B. Desu J. Mater. Res. 8 1993 339
7. K. Aoki, Y. Fukuda, K. Numata, and A. Nishimura Jpn. J. Appl. Phys. 34 1995 192
8. A. Wu, I.M.M. Salvado, P.M. Vilarinho, and J.L. Baptista J. Eur. Ceram. Soc. 17 1997 1443
9. A. Wu, P.M. Valarinho, I.M.M. Salvado, and J.L. Baptista Mater. Res. Bull. 33 1998 59
10. T. Tanase, A. Nishikata, Y. Iizuka, Y. Kobayashi, M. Konno, and T. Miwa J. Ceram. Soc. Jpn. 110 2002 911
11. T. Tanase, Y. Kobayashi, T. Miwa, and M. Konno Mater. Res. Soc. Symp. Proc. 784 2004 C3-32-1
12. Powder Diffraction File, International Center for Diffraction Data, Swarthmore, PA, 1989, Card No. 39-1395.
13. S.-H. Kim, Y.-S. Choi, C.-E. Kim, and D.-Y. Yang Thin Solid Films 325 1998 72
14. C.D.E. Lakeman, and D.A. Payne J. Am. Ceram. Soc. 75 1992 3091
15. J. Fukushima, K. Kodaira, and T. Matsushita J. Mater. Sci. 19 1984 595
16. S.-I. Jang, and H.M. Jang Ceram. Int. 26 2000 421
17. D. Wu, A. Li, H. Ling, X. Yin, C. Ge, M. Wang, and N. Ming Appl. Surf. Sci. 165 2000 309
18. L. López, J. Portelles, J.M. Siqueiros, G.A. Hirata, and J. Mckittrick Thin Solid Films 373 2000 49
19. X.G. Tang, L.L. Jiang, and A.L. Ding Microelectron. Eng. 65 2003 387
20. X.G. Tang, H.L.W. Chan, A.L. Ding, and Q.R. Yin Surf. Coat. Technol. 161 2002 169
21. N. Jayasundere, and B.V. Smith J. Appl. Phys. 73 1993 2462
22. I. Vrejoiu, J.D. Pedarnig, M. Dinescu, S. Bauer-Gogonea, and D. Bäuerle Appl. Phys., A 74 2002 407
23. S.K. Bhattacharya, and R.R. Tummala Microelectron. J. 32 2001 11