The effects of PbTiO3 thin template layer and Pt/RuO2 hybrid electrode on the ferroelectric properties of sol-gel derived PZT thin film

Thin Solid Films

Volumn 325, Issue 1-2, 1998, Pages 72-78

  Kim, Seung Hyun ^a   Choi, Yong Soo ^b   Kim, Chang Eun ^b   Yang, Doo Young ^c  

^a North Carolina State University   (United States)

^b Yonsei University   (South Korea)

^c Hynix Semiconductor Inc   (South Korea)

Author keywords

Fatigue degradation; Ferroelectric thin film; Hybrid electrode; PZT; Sol gel method; Template layer

Indexed keywords

FATIGUE OF MATERIALS; FERROELECTRICITY; LEAD COMPOUNDS; LEAKAGE CURRENTS; PLATINUM COMPOUNDS; SOL-GELS; THIN FILMS;

HYBRID ELECTRODES; THIN TEMPLATE LAYERS;

DIELECTRIC FILMS;

EID: 0032115490     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00486-6     Document Type: Article

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