Effect of Ar + ion implantation on the nano-mechanical properties and microstructure of single crystal silicon

Applied Surface Science

Volumn 249, Issue 1-4, 2005, Pages 386-392

  Sun, Rong ^a,b   Xu, Tao ^a   Xue, Qun Ji ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b HENAN UNIVERSITY   (China)

Author keywords

Ion implantation; Microstructure; Nano indentation; Nano scratch; Single crystal silicon

Indexed keywords

ELASTIC MODULI; ION IMPLANTATION; MICROSTRUCTURE; NANOTECHNOLOGY; POLYCRYSTALLINE MATERIALS; PRESSURE EFFECTS; SCANNING ELECTRON MICROSCOPY; SILICON; SURFACE ROUGHNESS;

NANO-INDENTATION; NANO-MECHANICAL PROPERTIES; NANO-SCRATCH; SINGLE CRYSTAL SILICON;

SINGLE CRYSTALS;

EID: 21244478972     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.12.015     Document Type: Article

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