Crystallization in HfO 2 gate insulators with in situ annealing studied by valence-band photoemission and x-ray absorption spectroscopy

Journal of Applied Physics

Volumn 97, Issue 10, 2005, Pages

  Toyoda, S ^a   Okabayashi, J ^a   Kumigashira, H ^a   Oshima, M ^a   Yamashita, K ^a   Niwa, M ^b   Usuda, K ^b   Liu, G L ^b  

^a UNIVERSITY OF TOKYO   (Japan)

^b SEMICONDUCTOR TECHNOLOGY ACADEMIC RESEARCH CENTER   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DOUBLE-PEAK STRUCTURE; GATE INSULATORS; GATE VOLTAGE; VALENCE-BAND PHOTOEMISSION;

ABSORPTION SPECTROSCOPY; ANNEALING; CMOS INTEGRATED CIRCUITS; CRYSTALLIZATION; HAFNIUM COMPOUNDS; PHOTOEMISSION; TRANSMISSION ELECTRON MICROSCOPY; X RAY SPECTROSCOPY;

GATES (TRANSISTOR);

EID: 21044444062     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1899228     Document Type: Article

References (15)

1. V. V. Afanas'ev, A. Stesmans, and W. Tsai, Appl. Phys. Lett. 82, 245 (2003).
2. C. T. Hsu, Y. K. Su, and M. Yokoyama, Jpn. J. Appl. Phys., Part 1 31, 2501 (1992).
3. B. H. Lee, L. Kang, R. Nieh, W.-J. Qi, and J. C. Lee, Appl. Phys. Lett. 76, 1926 (2000).
4. S. Toyoda, J. Okabayashi, H. Kumigashira, K. Ono, M. Niwa, K. Usuda, and G. L. Liu, Appl. Phys. Lett. 84, 2328 (2004).
5. M.-H. Cho et al., Appl. Phys. Lett. 81, 472 (2002).
6. M.-Y. Ho et al., J. Appl. Phys. 93, 1477 (2003).
7. H. Kim, P. C. Mclntyre, and K. C. Saraswat, Appl. Phys. Lett. 82, 106 (2003).
8. H. Kim, A. Marshall, P. C. Mclntyre, and K. C. Saraswat, Appl. Phys. Lett. 84, 2064 (2004).
9. K. Yamamoto, S. Hayashi, M. Niwa, M. Asai, S. Horii, and N. Miya, Jpn. J. Appl. Phys., Part 1 42, 1835 (2002).
10. S. Toyoda, J. Okabayashi, H. Kumigashira, K. Ono, M. Niwa, K. Usuda, and N. Hirashita, J. Electron Spectrosc. Relat. Phenom. 137-140, 141 (2004).
11. X. Zhao and D. Vanderbilt, Phys. Rev. B 65, 233 106 (2002).
12. J. Kang, E. C. Lee, and K. J. Chang, Phys. Rev. B 68, 054 106 (2003).
13. A. S. Foster, F. Lopez Gejo, A. L. Shluger, and R. M. Nieminen, Phys. Rev. B 65, 174 117 (2002).
14. R. B. van Dover, M. L. Green, L. Manchanda, L. F. Schneemeyer, and T. Siegrist, Appl. Phys. Lett. 83, 1459 (2003).
15. Y. Uehara, K. Kawase, J. Tsuchimoto, and T. Shibano, IEICE Report No. SDM2003-71 (2003-06).