Pull-in dynamics: Analysis and modeling of the transitional regime

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 249-252

  Rocha, L A ^a   Cretu, E ^b   Wolffenbuttel, R F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ACTUATORS; CAPACITORS; DAMPING; DIFFERENTIAL EQUATIONS; ELECTRIC POTENTIAL; ELECTRODES; ELECTROSTATICS; MATHEMATICAL MODELS; SENSORS; SWITCHES; TRANSFER FUNCTIONS;

APPLIED VOLTAGE; ELECTROSTATIC FORCES; MECHANICAL NOISE; Q DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 3042704360     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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2. H.A.C. Tilmans, and R. Legtenberg, "Electrostatically driven vacuum-encapsulated polysilicon resonators, Part 2, Theory and performance", Sensors and Actuators, vol A45, pp. 67-84, 1994.
3. R. Nadal-Guardia, A. Dehé, R. Aigner and L.M. Castañer, "Current drive models to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point", J. Microelectromech. Syst., vol 11, pp. 255-263, 2002.
4. M.H.H. Nijhuis, T.G.H. Basten, Y.H. Wijnant, H.Tijdeman and H.A.C. Tilmans "Transient Non-Linear Response of 'Pull-in MEMS Devices' Including Squeeze film Effects", in Proc. Eurosensors XIII, The Hage, The Netherlands, 1999, pp. 729-732.
5. R.K. Gupta and S.D. Senturia "Pull-in time dynamics as a measure of absolute pressure" in Proc. MEMS'97, Nagoya, Japan, 1997, pp. 290-294.
6. H. Yang, L.S. Pakula and P.J. French, "A Novel Pull-in Accelerometer" in Proc. Eurosensors XVII, Guimarães, Portugal, 2003, pp. 204-207.
7. L.A. Rocha, E. Cretu and R.F. Wolffenbuttel, "Displacement Model for Dynamic Pull-In Analysis and Application in Large-Stroke Electrostatic Actuators" in Proc. Eurosensors XVII, Guimarães, Portugal, 2003, pp. 448-451.
8. http://www.europractice.bosch.com/en/start/index.htm.