Analytical model for the pull-inTime of low-Q MEMS devices

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 2, Issue , 2004, Pages 271-274

  Rocha, L A ^a   Cretu, E ^b   Wolffenbuttel, R F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Melexis ^*  (Belgium)

Author keywords

Large signal analysis; MEMS dynamics; Pull in; Squeeze film damping

Indexed keywords

ACCELERATION; DAMPING; DIFFERENTIAL EQUATIONS; DYNAMIC RESPONSE; ELECTRIC POTENTIAL; ELECTRODES; LINEARIZATION; MATHEMATICAL MODELS; SENSORS; STRUCTURAL ANALYSIS; TRANSFER FUNCTIONS; VACUUM;

LARGE-SIGNAL ANALYSIS; MEMS DYNAMICS; PULL-IN; SQUEEZE FILM DAMPING;

MICROELECTROMECHANICAL DEVICES;

EID: 6344287600     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. P.M. Osterberg and S.D. Senturia, "M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures", J. Microelectromech. Syst., vol. 6, pp. 107-118, 1997.
2. H.A.C. Tilmans, and R. Legtenberg, "Electrostatically driven vacuum-encapsulated polysilicon resonators, Part 2, Theory and performance", Sensors and Actuators, vol A45, pp. 67-84, 1994.
3. M.H.H. Nijhuis, T.G.H. Basten, Y.H. Wijnant, H.Tijdeman and H.A.C. Tilmans "Transient Non-Linear Response of 'Pull-in MEMS Devices' Including Squeeze film Effects", in Proc. Eurosensors XIII, The Hage, The Netherlands, 1999, pp. 729-732.
4. R.K. Gupta and S.D. Senturia "Pull-in time dynamics as a measure of absolute pressure" in Proc. MEMS'97, Nagoya, Japan, 1997, pp. 290-294.
5. H. Yang, L.S. Pakula and P.J. French, "A Novel Pull-in Accelerometer" in Proc. Eurosensors XVII, Guimarães, Portugal, 2003, pp. 204-207.
6. L.A. Rocha, E. Cretu and R.F. Wolffenbuttel, "Displacement Model for Dynamic Pull-In Analysis and Application in Large-Stroke Electrostatic Actuators" in Proc. Eurosensors XVII, Guimarães, Portugal, 2003, pp. 448-451.
7. T. Veijola, H. Kuisma, J. Lahdenperä and T. Ryhänen, "Equivalent-circuit model of the squeezed gas film in a silicon accelerometer", Sensors and Actuators, vol A48, pp. 239-248, 1995.
8. T. Veijola, "End Effects of Rare Gas flow in Short Channels and in Squeezed-Film Dampers", in Proc. MSM'02, San Juan, Puerto Rico, USA, 2002, pp. 104-107.
9. http://www.europractice.bosch.com/en/start/index.htm.