Effect of oxygen addition to methane on growth of vertically oriented carbon nanotubes by radio-frequency plasma-enhanced chemical-vapor deposition

Journal of Applied Physics

Volumn 97, Issue 10, 2005, Pages

  Ikuno, Takashi ^a   Honda, Shin Ichi ^a   Kamada, Kazunori ^a   Oura, Kenjiro ^a   Katayama, Mitsuhiro ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIAGNOSTIC TOOLS; PLASMA STATES; RADIO-FREQUENCY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SELF-BIAS VOLTAGES;

CARBON NANOTUBES; ELECTRONIC EQUIPMENT; NANOTECHNOLOGY; NUCLEATION; OXYGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTOR QUANTUM WIRES;

METHANE;

EID: 20944452144     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1909285     Document Type: Article

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