Diamond films grown by a 60-kW microwave plasma chemical vapor deposition system

Diamond and Related Materials

Volumn 10, Issue 9-10, 2001, Pages 1569-1572

  Tachibana, Takeshi ^a   Ando, Yutaka ^a   Watanabe, Akihiko ^a   Nishibayashi, Yoshiki ^a   Kobashi, Koji ^a   Hirao, Takashi ^a   Oura, Kenjiro ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

915 MHz; Chemical vapor deposition; Diamond; Microwave; Wafer

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMONDS; MORPHOLOGY; RAMAN SCATTERING;

DIAMOND WAFERS;

DIAMOND FILMS;

DIAMOND;

EID: 0035449809     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00410-1     Document Type: Article

References (7)