Development of microelectromechanical variable blaze gratings

Sensors and Actuators, A: Physical

Volumn 64, Issue 1, 1998, Pages 7-15

  Burns, David M ^a   Bright, Victor M ^a  

^a Air Force Institute of Technology   (United States)

Author keywords

Gratings; MEMS; Micro optics; Polysilicon

Indexed keywords

ACTUATORS; LIGHT; MICROMACHINING; OPTICS;

BLAZE ANGLE; VARIABLE BLAZE GRATINGS;

DIFFRACTION GRATINGS;

EID: 0031698059     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)80052-6     Document Type: Article

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