100-nm-scale alignment using laser beam diffraction pattern observation techniques and wafer fusion for realizing three-dimensional photonic crystal structure

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 6 A, 1998, Pages 3334-3338

  Yamamoto, Noritsugu ^a   Noda, Susumu ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Micromachining; Photonic band gap; Photonic crystal; Wafer alignment; Wafer fusion

Indexed keywords

EID: 0000137031     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.3334     Document Type: Article

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