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Volumn 86, Issue 17, 2005, Pages 1-3
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Local measurement of surface states energy distribution in semiconductors using Kelvin probe force microscope
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CAPACITANCE;
ELECTRIC POTENTIAL;
FERMI LEVEL;
INTEGRATION;
MOSFET DEVICES;
SCANNING TUNNELING MICROSCOPY;
CONTACTLESS METHODS;
KELVIN PROBE FORCE MICROSCOPES;
PHOTOEMISSION SPECTROSCOPY;
SPACE CHARGE REGION (SCR);
SEMICONDUCTOR JUNCTIONS;
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EID: 20844438829
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1906296 Document Type: Article |
Times cited : (16)
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References (17)
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