Dense PZT thick films derived from sol-gel based nanocomposite process

Materials Science and Engineering: B

Volumn 99, Issue 1-3, 2003, Pages 56-62

  Wang, Zhihong ^a   Zhu, Weiguang ^a   Zhao, Changlei ^a   Tan, Ooi Kiang ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Piezoelectric thick film; Powder size effect; Sol gel based nanocomposite process

Indexed keywords

ANNEALING; BALL MILLING; COMPOSITION; CRYSTALLIZATION; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; MULTILAYERS; NANOSTRUCTURED MATERIALS; PARTICLE SIZE ANALYSIS; PIEZOELECTRIC MATERIALS; PORE SIZE; SILICON; SILICON WAFERS; SINTERING; SOL-GELS; SPIN COATING;

SUBMICRON-SIZED GRAINS;

THICK FILMS;

EID: 0038377542     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00568-8     Document Type: Conference Paper

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