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Surface and Coatings Technology

Volumn 198, Issue 1-3 SPEC. ISS., 2005, Pages 437-440

Corrosion resistance of nitrogenated amorphous carbon films prepared by facing target sputtering

(3) Shi, J R a Xu, Y J a Zhang, J a

a DATA STORAGE INSTITUTE (Singapore)

Author keywords

Corrosion; Facing target sputtering; Nitrogenated amorphous carbon

Indexed keywords

CARBON; CORROSION RESISTANCE; ELLIPSOMETRY; MAGNETRON SPUTTERING; NITROGEN; RAMAN SPECTROSCOPY; SILICON; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS CARBON FILMS; CORROSION SPOTS; FACING TARGET SPUTTERING (FTS) TECHNIQUES; TAUC OPTICAL BAND GAPS;

AMORPHOUS FILMS;

CORROSION RESISTANCE; SPUTTERING;

EID: 20744452784 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.10.054 Document Type: Article

Times cited : (6)

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