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Volumn 198, Issue 1-3 SPEC. ISS., 2005, Pages 64-67

Effect of annealing on DC sputtered aluminum nitride films

Author keywords

AlN; Annealing; Bandgap; C V; FTIR; Sputtering

Indexed keywords

ANNEALING; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; NITROGEN; THIN FILMS;

ALUMINUM NITRIDE FILMS (ALN); BANDGAP; ELECTRONIC STATE DENSITY; NITROGEN GAS;

ALUMINUM NITRIDE;

EID: 20744446755 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.10.074 Document Type: Article

Times cited : (18)

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