Novel fabrication method of metallic glass thin films using carousel type sputtering system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5650, Issue , 2005, Pages 260-267

  Sakurai, J ^a   Hata, S ^a   Shimokohbe, A ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Carousel type sputtering system; Glass transition; MEMS; Metallic glass thin film; Super liquid region

Indexed keywords

AMORPHIZATION; AMORPHOUS ALLOYS; CRYSTALLIZATION; DIFFERENTIAL SCANNING CALORIMETRY; GLASS TRANSITION; METALLIC GLASS; MICROELECTROMECHANICAL DEVICES; SPUTTERING; X RAY DIFFRACTION;

CAROUSEL TYPE SPUTTERING SYSTEM; METALLIC GLASS THIN FILMS; SOLID-STATE AMORPHIZATION; SUPER LIQUID REGION;

THIN FILMS;

EID: 20344378972     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.581811     Document Type: Conference Paper

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