Integrated conical spring linear actuator

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 574-581

  Hata, S ^a   Kato, T ^a   Fukushige, T ^a   Shimokohbe, A ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

3D shape; Electrostatic force; MEMS; Microactuator; Thin film metallic glass

Indexed keywords

AMORPHOUS ALLOYS; ELECTRODES; METALLIC GLASS; SUPERCOOLING;

SUPERCOOLED LIQUID REGION (SCLR);

ELECTROSTATIC ACTUATORS;

EID: 0038358318     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00116-3     Document Type: Conference Paper

References (8)

1. Boser B.E., Howe R.T. Surface micromachined accelerometers. IEEE J. Solid-State Circuits. 31:(3):1996;366-375.
2. Eaton W.P., Smith J.H., Monk D.J., O'Brien G., Miller T.F. Comparison of bulk- and surface-micromachined pressure sensors. SPIE Proc. 3514:1998;471-479.
3. Tezcan D.S., Eminoglu S., Akar O.S., Akin T. A low cost uncooled infrared microbolometer focal plane array using the CMOS N-well layer. 14th IEEE International MicroElectroMechanical Systems Conference (MEMS 2001) :2001;566-569.
4. Horsley D.A. Design and fabrication of an angular microactuator for magnetic disk drives. IEEE J. Microelectromech. Syst. 7:(2):1998;141-148.
5. Samper V.D. Torque evaluation of a LIGA fabricated electrostatic micromotor. IEEE J. Microelectromech. Syst. 8:(1):1999;115-123.
6. Hata S., Sato K., Shimokohbe A. Fabrication of thin film metallic glass and its application to microactuator. SPIE International Symposium on Microelectronics and Micro-Electro-Mechanical Systems, MICRO/MEMS'99, 3892 :1999;97-108.
7. Liu Y., Hata S., Wada K., Shimokohbe A. Thermal, mechanical and electrical properties of Pd-based thin film metallic glass. Jpn. J. Appl. Phys. 40:2001;5382-5388.
8. Higo Y., Takashima K., Shimojo M., Sugiura S., Pfister B., Swain M.V. Fatigue testing machine of micro-sized specimens for MEMS applications. Mater. Res. Soc. Symp. Proc. 605:2000;241-246.