Infrared properties of ultrathin oxides on Si(1 0 0)

Microelectronic Engineering

Volumn 80, Issue SUPPL., 2005, Pages 420-423

  Giustino, Feliciano ^a   Pasquarello, Alfredo ^b  

^a EPFL   (Switzerland)

^b INSTITUT ROMAND DE RECHERCHE NUMÉRIQUE EN PHYSIQUE DES MATÉRIAUX IRRMA   (Switzerland)

Author keywords

Dielectric permittivity; Infrared spectra; Si SiO2 interface

Indexed keywords

FUNCTIONS; INFRARED RADIATION; LIGHT ABSORPTION; MATHEMATICAL MODELS; PERMITTIVITY; SILICA; STOICHIOMETRY;

INFRARED ABSORPTION; INFRARED SPECTRA; SI/SIO2; VIBRATIONAL FREQUENCIES;

ULTRATHIN FILMS;

EID: 19944406813     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.04.025     Document Type: Conference Paper

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